Study of Anisotropic Strain in Self-Assembled GaN Microdisks Grown by Molecular Beam Epitaxy

Wang, Ying-Chieh and Yang, Hong-Yi and Lo, Ikai and Tsai, Cheng-Da and Shih, Huei-Jyun and Huang, Hui-Chun and Chou, Mitch M. C. and Huang, Louie and Wang, Terence and Kuo, Ching T. C. (2023) Study of Anisotropic Strain in Self-Assembled GaN Microdisks Grown by Molecular Beam Epitaxy. In: Recent Progress in Chemical Science Research Vol. 6. B P International, pp. 1-14. ISBN 978-81-19054-02-2

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Abstract

Systematic research has been done on lattice relaxation on wurtzite GaN microdisks produced by plasma-assisted molecular beam epitaxy. High-resolution transmission electron microscopy was used to assess the lattice constants of GaN microdisks. The anisotropic strain was analyzed by the microscopic atomic layers of GaN microdisks. We learned that the lateral lattice strain along a-axis followed a linear relation during the epi-growth, while the vertical lattice strain with c-axis exhibited a quadratic deviation.

Item Type: Book Section
Subjects: Journal Eprints > Chemical Science
Depositing User: Managing Editor
Date Deposited: 10 Oct 2023 05:35
Last Modified: 10 Oct 2023 05:35
URI: http://repository.journal4submission.com/id/eprint/2713

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